Multispecies nitrogen diffusion in silicon

Journal of Applied Physics

Volumn 100, Issue 8, 2006, Pages

  Voronkov, V V ^a   Falster, R ^b  

^a MEMC Electronic Materials   (Italy)

^b MEMC Electronic Materials SpA   (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; DIMERS; DISSOCIATION; MASS SPECTROMETRY; MONOMERS; NITROGEN; SILICON;

ION MASS SPECTROSCOPY; NONINTERACTING COMPONENTS; TRIMERS;

DIFFUSION;

EID: 33750527781     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2359609     Document Type: Article

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