Nitrogen Out-Diffusion from Czochralski Silicon Monitored by Depth Profiles of Shallow Thermal Donors

Solid State Phenomena

Volumn 95-96, Issue , 2004, Pages 117-122

  Voronkov, V V ^a   Batunina, A V ^b   Voronkova, G I ^b   Falster, R ^a  

^a MEMC   (Italy)

^b INSTITUTE OF RARE METALS   (Russian Federation)

Author keywords

Nitrogen; Out Diffusion; Oxygen; Silicon; Thermal Donors

Indexed keywords

ANNEALING; COMPLEXATION; CONCENTRATION (PROCESS); CRYSTAL GROWTH FROM MELT; CRYSTAL IMPURITIES; DIFFUSION IN SOLIDS; DIMERS; DISSOCIATION; DOPING (ADDITIVES); MONOMERS; NITROGEN; OXIDATION; PRECIPITATION (CHEMICAL); QUENCHING;

INTERSTITIAL STATES; OUT-DIFFUSION PROFILES;

SILICON;

EID: 1642557049     PISSN: 10120394     EISSN: None     Source Type: Book Series    
DOI: None     Document Type: Conference Paper

References (6)

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