Improved memory window for Ge nanocrystals embedded in SiON layer

Applied Physics Letters

Volumn 89, Issue 16, 2006, Pages

  Tu, Chun Hao ^a   Chang, Ting Chang ^b,c   Liu, Po Tsun ^a   Liu, Hsin Chou ^a   Sze, Simon M ^a   Chang, Chun Yen ^a  

^a NATIONAL CHIAO TUNG UNIVERSITY   (Taiwan)

^b NATIONAL SUN YAT SEN UNIVERSITY   (Taiwan)

^c NATIONAL SUN YAT SEN UNIVERSITY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

BAND STRUCTURE; ELECTRON TRAPS; GERMANIUM COMPOUNDS; MOLECULAR STRUCTURE; OXIDATION; SILICON COMPOUNDS;

INTERFACE TRAP STATES; MEMORY WINDOW; SILICON GERMANIUM NITRIDE (SIGEN);

NANOSTRUCTURED MATERIALS;

EID: 33750162062     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2362972     Document Type: Article

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