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New Diamond and Frontier Carbon Technology

Volumn 16, Issue 3, 2006, Pages 163-176

Growth of carbon nanotubes by plasma-enhanced chemical vapor deposition

Author keywords

Carbon nanotubes; Direct growth; Low temperature growth; Plasma enhanced chemical vapor deposition; Vertically aligned growth

Indexed keywords

INTEGRATED CIRCUITS; NANOTECHNOLOGY; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; PLASMAS; THERMODYNAMIC PROPERTIES;

DIRECT GROWTH; LOW TEMPERATURE GROWTH; PLASMA-ENHANCED CHEMICAL VAPOR DEPOSITION; VERTICALLY ALIGNED GROWTH;

CARBON NANOTUBES;

EID: 33748971736 PISSN: 13449931 EISSN: None Source Type: Journal
DOI: None Document Type: Review

Times cited : (16)

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