Fabrication of carbon nanotube array and its field emission property

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 22, Issue 3, 2004, Pages 1335-1337

  Sato, Hideki ^a   Takegawa, Hitoshi ^a   Yamaji, Hiroki ^a   Miyake, Hideto ^a   Hiramatsu, Kazumasa ^a   Saito, Yahachi ^a  

^a MIE UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

CURRENT DENSITY; ELECTRON EMISSION; FIELD EMISSION DISPLAYS; FILM GROWTH; PHOTORESISTS; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; SCANNING ELECTRON MICROSCOPY; SCREENING; SILICA; SILICON; ULTRAVIOLET RADIATION;

CARBON NANOTUBE ARRAYS; FIELD EMISSION PROPERTIES; PHOTORESIST FILMS; PROTUSIONS;

CARBON NANOTUBES;

EID: 3242670741     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1667515     Document Type: Conference Paper

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