Effective fabrication of three-dimensional nano/microstructures in a single step using multilayered stamp

Applied Physics Letters

Volumn 88, Issue 20, 2006, Pages

  Park, Sang Hu ^a   Lim, Tae Woo ^a   Yang, Dong Yol ^a   Jeong, Jun Ho ^b   Kim, Ki Don ^b   Lee, Kwang Sup ^c   Kong, Hong Jin ^a  

^a Korea Advanced Institute of Science and Technology (KAIST)   (South Korea)

^b Korea Institute of Machine and Materials   (South Korea)

^c Hannam University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

COST EFFECTIVENESS; LITHOGRAPHY; MICROSTRUCTURE; MULTILAYERS; PLASMA APPLICATIONS; POLYMERIZATION;

ANTIADHESION MATERIALS; DIAMOND LIKE COATINGS (DLC); MULTILAYERED STAMPS; THREE-DIMENSIONAL NANOPATTERNS;

NANOSTRUCTURED MATERIALS;

EID: 33646885543     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2204448     Document Type: Article

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