UV-nanoimprint lithography using a diamond-like carbon stamp

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6151 II, Issue , 2006, Pages

  Jeong, Jun Ho ^a   Kim, Ki Don ^a   Sim, Young Suk ^a   Choi, Dae Geun ^a   Lee, Eung Sug ^a   Park, Sang Hu ^b   Lim, Tae Woo ^b   Yang, Dong Yol ^b  

^a Korea Institute of Machine and Materials   (South Korea)

^b Korea Advanced Institute of Science and Technology (KAIST)   (South Korea)

Author keywords

Diamond like Carbon; Electron beam lithography; Stamp; Two photon polymerization; Ultraviolet nanoimprint lithography

Indexed keywords

DIAMONDS; MAGNETRON SPUTTERING; NANOTECHNOLOGY; NATURAL FREQUENCIES; PHOTOPOLYMERIZATION; ULTRAVIOLET RADIATION;

DIAMOND-LIKE CARBON; STAMP; TWO-PHOTON POLYMERIZATION; ULTRAVIOLET-NANOIMPRINT LITHOGRAPHY;

ELECTRON BEAM LITHOGRAPHY;

EID: 33745624254     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.657132     Document Type: Conference Paper

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