Zinc oxide-based transparent conductive oxide films prepared by pulsed magnetron sputtering from powder targets: Process features and film properties

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 24, Issue 5, 2006, Pages 1782-1789

  Kelly, P J ^a   Zhou, Y ^b  

^a MANCHESTER METROPOLITAN UNIVERSITY   (United Kingdom)

^b Anshan University of Technology   (China)

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTAL DEFECTS; ELECTRON MICROSCOPY; MAGNETRON SPUTTERING; SPECTROPHOTOMETRY; X RAY DIFFRACTION; ZINC OXIDE;

POWDER BLENDS; POWDER TARGETS; TRANSPARENT CONDUCTIVE OXIDE (TCO) FILMS; VAN DER PAUW'S METHOD;

CONDUCTIVE FILMS;

EID: 33748593668     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.2218857     Document Type: Article

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