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Volumn 447-448, Issue , 2004, Pages 33-39
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The characteristics of aluminium-doped zinc oxide films prepared by pulsed magnetron sputtering from powder targets
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Author keywords
Pulsed magnetron sputtering; Transparent conductive oxides; ZnO:Al coatings
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Indexed keywords
ADHESION;
ALUMINA;
ALUMINUM;
CRYSTALLINE MATERIALS;
ELECTRIC CONDUCTIVITY;
ELECTRIC PROPERTIES;
MAGNETRON SPUTTERING;
OPTICAL PROPERTIES;
POWDER METALS;
SCANNING ELECTRON MICROSCOPY;
SEMICONDUCTOR DOPING;
X RAY DIFFRACTION ANALYSIS;
ZINC OXIDE;
CRYSTALLINITY;
PULSED MAGNETRON SPUTTERING;
OPTICAL COATINGS;
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EID: 1342305089
PISSN: 00406090
EISSN: None
Source Type: Journal
DOI: 10.1016/j.tsf.2003.09.018 Document Type: Conference Paper |
Times cited : (97)
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References (18)
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