The characteristics of aluminium-doped zinc oxide films prepared by pulsed magnetron sputtering from powder targets

Thin Solid Films

Volumn 447-448, Issue , 2004, Pages 33-39

  Zhou, Y ^a   Kelly, P J ^a   Postill, A ^a   Abu Zeid, O ^b   Alnajjar, A A ^c  

^a UNIVERSITY OF SALFORD   (United Kingdom)

^b UNITED ARAB EMIRATES UNIVERSITY   (United Arab Emirates)

^c UNIVERSITY OF SHARJAH   (United Arab Emirates)

Author keywords

Pulsed magnetron sputtering; Transparent conductive oxides; ZnO:Al coatings

Indexed keywords

ADHESION; ALUMINA; ALUMINUM; CRYSTALLINE MATERIALS; ELECTRIC CONDUCTIVITY; ELECTRIC PROPERTIES; MAGNETRON SPUTTERING; OPTICAL PROPERTIES; POWDER METALS; SCANNING ELECTRON MICROSCOPY; SEMICONDUCTOR DOPING; X RAY DIFFRACTION ANALYSIS; ZINC OXIDE;

CRYSTALLINITY; PULSED MAGNETRON SPUTTERING;

OPTICAL COATINGS;

EID: 1342305089     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2003.09.018     Document Type: Conference Paper

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