New transparent conducting thin films using multicomponent oxides composed of ZnO and V2O5 prepared by magnetron sputtering

Thin Solid Films

Volumn 411, Issue 1, 2002, Pages 76-81

  Miyata, Toshihiro ^a   Suzuki, Shingo ^a   Ishii, Makoto ^a   Minami, Tadatsugu ^a  

^a KANAZAWA INSTITUTE OF TECHNOLOGY   (Japan)

Author keywords

Magnetron sputtering; Multicomponent oxide; TCO; Thin film; Vanaduim oxide; ZnO V2O5; ZnV2O4

Indexed keywords

ELECTRIC CONDUCTIVITY OF SOLIDS; HYDROCHLORIC ACID; MAGNETRON SPUTTERING; TERNARY SYSTEMS; THERMAL EFFECTS; VANADIUM COMPOUNDS; ZINC OXIDE;

TERNARY COMPOUNDS;

THIN FILMS;

EID: 0037157422     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(02)00191-8     Document Type: Conference Paper

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