Stability and sensing mechanism of high sensitivity chlorine gas sensors using transparent conducting oxide thin films

Thin Solid Films

Volumn 355, Issue , 1999, Pages 35-40

  Miyata, Toshihiro ^a   Minami, Tadatsugu ^a  

^a KANAZAWA INSTITUTE OF TECHNOLOGY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

CARRIER CONCENTRATION; CARRIER MOBILITY; CHLORINE; COMPOSITION EFFECTS; CONDUCTIVE FILMS; ELECTRIC CONDUCTIVITY OF SOLIDS; ELECTRON TRAPS; FILM PREPARATION; HALL EFFECT; MAGNETRON SPUTTERING; THIN FILM DEVICES;

HIGH SENSITIVITY CHLORINE GAS SENSORS; TRANSPARENT CONDUCTING OXIDE THIN FILMS;

CHEMICAL SENSORS;

EID: 0033342428     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(99)00440-X     Document Type: Article

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