Modeling of nonlinear micromechanical resonators and their simulation with the harmonic-balance method

International Journal of RF and Microwave Computer-Aided Engineering

Volumn 11, Issue 5, 2001, Pages 310-321

  Veijola, Timo ^a   Mattila, Tomi ^b  

^a AALTO UNIVERSITY   (Finland)

^b VTT TECHNICAL RESEARCH CENTRE OF FINLAND   (Finland)

Author keywords

Electrical equivalent circuit; Electromechanical transducer; Harmonic balance simulation; Micromechanical resonator; Nonlinear device modeling

Indexed keywords

COMPUTER SIMULATION; HARMONIC ANALYSIS; MICROMACHINING; TRANSDUCERS; VOLTAGE CONTROL;

HARMONIC-BALANCE SIMULATION; MICROMECHANICAL RESONATORS;

RESONATORS;

EID: 0035449859     PISSN: 10964290     EISSN: None     Source Type: Journal    
DOI: 10.1002/mmce.1039     Document Type: Article

References (25)

1. The solution of elastic plate problem by electrical analogies
2. A SPICE-based library for mechatronic systems
3. CAD for microelectromechanical systems
4. CAD challenges for microsensors, microactuators, and microsystems
5. Modeling the mechanical behavior of bulk-micromachined silicon accelerometers
6. Microelectromechanical filters for signal processing
7. Micromachined devices for wireless communications
8. Closed-loop silicon accelerometer
9. Equivalent circuit representation of electromechanical transducers: I. Lumped-parameter systems
10. Equivalent circuit representation of electromechanical transducers: II. Distributed-parameter systems
11. Nonlinearity and hysteresis of resonant strain gauges
12. Finite-difference large-displacement gas-film model
13. APLAC-object-oriented circuit simulator and design tool
14. Duality in mechanics
15. Theoretical modeling of microfabricated beams with elastically restained supports
16. Electromechanical analysis of micromechanical SOI-fabricated RF resonators
17. Quality factors in micron- and submicron-thick cantilevers