Ion-beam characteristics of the metal cluster complex of Ir 4(CO)12

Journal of Applied Physics

Volumn 100, Issue 4, 2006, Pages

  Fujiwara, Yukio ^a   Kondou, Kouji ^a   Teranishi, Yoshikazu ^a   Nonaka, Hidehiko ^a   Fujimoto, Toshiyuki ^a   Kurokawa, Akira ^a   Ichimura, Shingo ^a   Tomita, Mitsuhiro ^b  

^a NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

^b TOSHIBA CORPORATION   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

COMPLEXATION; DEPOSITION; ION BEAMS; ION BOMBARDMENT; IRRADIATION; KINETIC ENERGY; SILICON; SPUTTERING;

CLUSTER IONS; COMPLEX-PROJECTILE BOMBARDMENT; EMPIRICAL EQUATIONS; SPUTTERING YIELDS;

IRIDIUM COMPOUNDS;

EID: 33748313443     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2335401     Document Type: Article

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