Compact sputter source for deposition of small size-selected clusters

Review of Scientific Instruments

Volumn 68, Issue 9, 1997, Pages 3335-3339

  Hall, S G ^a   Nielsen, M B ^a   Robinson, A W ^a   Palmer, R E ^a  

^a UNIVERSITY OF BIRMINGHAM   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0001395143     PISSN: 00346748     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1148293     Document Type: Article

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