Development of a triplasmatron ion source for the generation of SF+5 and F- primary ion beams on an ion microscope secondary ion mass spectrometry instrument

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 17, Issue 3, 1999, Pages 845-852

  Gillen, Greg ^a   King, R Lance ^a   Chmara, Frank ^b  

^a NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY   (United States)

^b Peabody Scientific   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0001400455     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.581657     Document Type: Article

References (13)

1. A. D. Appelhans and J. Delmore, Anal. Chem. 61, 1087 (1989).
2. W. Szymczak and K. Wittmaack, Nucl. Instram. Methods Phys. Res. B 88, 149 (1994).
3. W. Reuter and G. Scilla, Anal. Chem. 60, 1401 (1988).
4. K. Iltgen, A. Benninghoven and E. Niehuis, Secondary Ion Mass Spectrometry: SIMS XI edited by G. Gillen, R. Lareau, J. Bennett and F. Stevie (Wiley, Chichester, 1998), pp. 367-370.
5. W. Reuter and J. G. Clabes, Anal. Chem. 60, 1404 (1988).
6. R. L. Hervig and P. Williams, Secondary Ion Mass Spectrometry: SIMS V, edited by A. Benninghoven, R. J. Coiton, D. S. Simons, and H. W. Werner (Springer, Berlin, 1986), pp. 152.
7. C. Lejeune, J. P. Grandchamp, O. Kessi, and J. P. Gilles, Vacuum 36, 851 (1986).
8. R. Masic, J. M. Sautter, and R. J. Warnecke, Nucl. Instrum. Methods 71, 338 (1969).
9. J. Aubert, G. Gautherin, and C. Lejeune, Proceedings of the Second International Conference on Ion Sources, Vienna, 1972, p. 797.
10. G. Gautherin, R. Masic, and R. J. Warnecke, U.S. Patent No. 3,631,283. (filed December 1971).
11. B. Wolf, Handbook of Ion Sources, edited by B. Wolf (Chemical Rubber, Boca Raton, FL, 1995), p. 47.
12. Certain commercial equipment, instruments or materials are identified in this article to specify adequately the experimental procedure. Such identification does not imply recommendation or endorsement by the National Institute of Standards and Technology, nor does it imply that the materials or equipment identified are necessarily the best available for the purpose.
13. G. Gillen and S. Roberson, Rapid Commun. Mass Spectrom. 12, 1303 (1998).