Secondary ion emission from polymer surfaces under Ar + , Xe + and SF + 5 ion bombardment

Applied Surface Science

Volumn 133, Issue 1-2, 1998, Pages 47-57

  Kotter F ^a   Benninghoven, A ^a  

^a UNIVERSITY OF MÜNSTER   (Germany)

Author keywords

Polymers; SIMS; Surface analysis; Surface mass spectrometry

Indexed keywords

ARGON; FLUORINE COMPOUNDS; MULTILAYERS; POLYCARBONATES; POLYETHYLENE GLYCOLS; POLYETHYLENE TEREPHTHALATES; POLYMETHYL METHACRYLATES; POLYPROPYLENES; POLYTETRAFLUOROETHYLENES; SECONDARY ION MASS SPECTROMETRY; SURFACE PHENOMENA; XENON;

ION EMISSION;

ION BOMBARDMENT;

EID: 0031653345     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0169-4332(97)00515-1     Document Type: Article

References (4)

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3. E. Niehuis, T. Heller, U. Jürgens, A. Benninghoven, J. Vac. Sci. Technol. B 7 (1989) 512.
4. A. Benninghoven et al., to be published.