Development of a parallel local oxidation nanolithography instrument

Review of Scientific Instruments

Volumn 77, Issue 8, 2006, Pages

  Martinez, Javier ^a   Losilla, Nuria S ^a   Biscarini, Fabio ^b   Schmidt, Georg ^c   Borzenko, Tanja ^c   Molenkamp, Laurens W ^c   Garcia, Ricardo ^a  

^a INSTITUTO DE MICROELECTRÓNICA DE MADRID   (Spain)

^b CNR   (Italy)

^c UNIVERSITY OF WÜRZBURG   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ARRAYS; ELECTRIC POTENTIAL; GASES; LITHOGRAPHY; OXIDATION; SCREWS;

BIAS VOLTAGE; NANOLITHOGRAPHY INSTRUMENT; PARALLEL PATTERNING; SILICON OXIDE;

NANOTECHNOLOGY;

EID: 33747862194     PISSN: 00346748     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2336773     Document Type: Review

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