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Volumn 30, Issue 6, 2005, Pages 652-654

Silicon microlens structures fabricated by scanning-probe gray-scale oxidation

Author keywords

[No Author keywords available]

Indexed keywords

GRAY-SCALE; OPTICAL COMPONENTS; REACTIVE ION ETCHING (REI); SCANNING PROBE;

ANISOTROPY; COOLING; ELECTRIC POTENTIAL; ETCHING; MICROMACHINING; OXIDATION; SCANNING; SILICON; SOLIDIFICATION; SURFACE TENSION;

MICROLENSES;

EID: 15544372467 PISSN: 01469592 EISSN: None Source Type: Journal
DOI: 10.1364/OL.30.000652 Document Type: Article

Times cited : (40)

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