Diagnostics of silicon submicron cylindrical structures obtained by plasma flow action

Vacuum

Volumn 80, Issue 11-12, 2006, Pages 1381-1385

  Dojčinović, Ivan P ^a   Kuraica, Milorad M ^a,b   Purić, Jagoš ^a,b  

^a UNIVERSITY OF BELGRADE   (Serbia)

^b Center for Science and Technology Development   (Serbia)

Author keywords

Capillary waves; LIPSS; Plasma flow; Ripple; Silicon; Surface modification

Indexed keywords

ATOMIC FORCE MICROSCOPY; COMPRESSORS; NITROGEN; OPTICAL MICROSCOPY; SCANNING ELECTRON MICROSCOPY; SILICON; SURFACE TREATMENT;

CAPILLARY WAVES; LIPSS; RIPPLE; SUBMICRON CYLINDRICAL STRUCTURES (SCS);

PLASMA FLOW;

EID: 33747801032     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.vacuum.2006.01.020     Document Type: Article

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