Formation of submicron cylindrical structures at silicon surface exposed to a compression plasma flow

JETP Letters

Volumn 74, Issue 4, 2001, Pages 213-215

  Uglov, V V ^a   Anishchik, V M ^a   Astashynski, V V ^a   Astashynski, V M ^b   Ananin, S I ^b   Askerko, V V ^b   Kostyukevich, E A ^b   Kuz'mitski, A M ^b   Kvasov, N T ^c   Danilyuk, A L ^c  

^a BELARUSIAN STATE UNIVERSITY   (Belarus)

^b B I STEPANOV INSTITUTE OF PHYSICS   (Belarus)

^c BELARUSIAN STATE UNIVERSITY OF INFORMATICS AND RADIOELECTRONICS   (Belarus)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 18044400210     PISSN: 00213640     EISSN: None     Source Type: Journal    
DOI: 10.1134/1.1413553     Document Type: Article

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