Silicon-carbide microfabrication by silicon lost molding for glass-press molds

Journal of Microelectromechanical Systems

Volumn 15, Issue 4, 2006, Pages 859-863

  Itoh, Toru ^a   Tanaka, Shuji ^a   Li, Jing Feng ^a,b   Watanabe, Ryuzo ^a   Esashi, Masayoshi ^a  

^a TOHOKU UNIVERSITY   (Japan)

^b TSINGHUA UNIVERSITY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL VAPOR DEPOSITION; CRYSTALLIZATION; MOLDING; PHASE TRANSITIONS; POLYCRYSTALLINE MATERIALS; SINTERING; SUBSTRATES; SURFACE ROUGHNESS;

GLASS-PRESS MOLDS; SILICON SUBSTRATE; SOLID-STATE REACTION BONDING;

SILICON CARBIDE;

EID: 33747447703     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2006.872231     Document Type: Article

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