Mechanical stress related instabilities in silicon under metal coverage

IEEE Transactions on Electron Devices

Volumn 47, Issue 12, 2000, Pages 2429-2437

  Manic, Dragan ^a   Igic, Peter M ^b   Mawby, Phil A ^b   Haddab, Youcef ^c   Popovic, Radivoje S ^d  

^a XEMICS   (Switzerland)

^b SWANSEA UNIVERSITY   (United Kingdom)

^c SCHLUMBERGER   (United States)

^d EPFL   (Switzerland)

Author keywords

Aluminum; FEM; Long term drift; Matching; Piezoresistance; Silicon; Stress

Indexed keywords

EID: 33747384605     PISSN: 00189383     EISSN: None     Source Type: Journal    
DOI: 10.1109/16.887033     Document Type: Article

References (20)

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