Modeling of Multilevel Structures: A General Method for Analyzing Stress Evolution During Processing

IEEE Transactions on Semiconductor Manufacturing

Volumn 5, Issue 2, 1992, Pages 128-137

  Cifuentes, Arturo O ^a   Shareef, Iqbal A ^a  

^a IBM   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SIMULATION; MATHEMATICAL TECHNIQUES - FINITE ELEMENT METHOD; STRESSES - ANALYSIS;

MATERIAL INTERFACES; MULTILEVEL STRUCTURES MODELING; STRESS EVOLUTION ANALYSIS;

SEMICONDUCTOR DEVICES;

EID: 0026868979     PISSN: 08946507     EISSN: 15582345     Source Type: Journal    
DOI: 10.1109/66.136274     Document Type: Article

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