On-wafer heating tests to study stability of silicon devices

Microelectronics Reliability

Volumn 38, Issue 6-8, 1998, Pages 1069-1073

  Manic, D ^a   Haddab, Y ^a   Popovic, R S ^a  

^a EPFL   (Switzerland)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINUM; HEATING; OPTIMIZATION; SEMICONDUCTING SILICON; SEMICONDUCTOR DEVICE TESTING; SILICON WAFERS;

ON-WAFER HEATING TECHNIQUES;

SEMICONDUCTOR DEVICES;

EID: 0032083615     PISSN: 00262714     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0026-2714(98)00094-8     Document Type: Article

References (9)

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