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Volumn 58, Issue 17, 1991, Pages 1845-1847
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Stress in metal lines under passivation; comparison of experiment with finite element calculations
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Author keywords
[No Author keywords available]
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Indexed keywords
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EID: 0000881016
PISSN: 00036951
EISSN: None
Source Type: Journal
DOI: 10.1063/1.105075 Document Type: Article |
Times cited : (96)
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References (15)
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