Using imprinting technology to fabricate three-dimensional devices from moulds of thermosetting polymer patterns

Semiconductor Science and Technology

Volumn 21, Issue 9, 2006, Pages 1213-1220

  Chen, Jem Kun ^a   Ko, Fu Hsiang ^b   Chan, Chia Hao ^b   Huang, Chih Feng ^b   Chang, Feng Chih ^b  

^a NATIONAL TAIWAN UNIVERSITY OF SCIENCE AND TECHNOLOGY   (Taiwan)

^b NATIONAL CHIAO TUNG UNIVERSITY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

CROSSLINKING; CRYSTAL STRUCTURE; ELECTRON BEAMS; GLASS TRANSITION; POLYMERS; SILICON; THERMOSETS;

CROSS-LINKED STRUCTURE; POLYMER PATTERNS; SHRINK FACTOR; THERMOSETTING POLYMERS;

PLASTIC MOLDS;

EID: 33747320498     PISSN: 02681242     EISSN: 13616641     Source Type: Journal    
DOI: 10.1088/0268-1242/21/9/001     Document Type: Article

References (23)

1. Chou S Y, Krauss P R and Renstrom P J 1996 Appl. Phys. Lett. 67 3114
2. Chou S Y, Krauss P R and Renstrom P J 1996 Science 272 85
3. Chou S Y, Krauss P R, Zhang W, Guo L and Zhuang L 1997 J. Vac. Sci. Technol. B 15 2897
4. Okazaki S 1991 J. Vac. Sci. Technol. B 9 2829
5. Hua F, Sun Y, Gaur A, Meitl M A, Bilhaut L, Rotkina L, Wang J, Geil P, Shim M and Rogers J A 2004 Nan. Lett. 4 2467-71
6. Hirai Y, Yoshikawa T, Takagi N, Yoshida S and Yamamoto K 2003 J. Photopolymer. Sci. Technol. 16 615
7. Hirai Y, Harada S, Kikuta H, Tanaka Y, Okano M, Isaka S and Kobayasi M 2003 J. Vac. Sci. Technol. B 20 2867
8. Hirai Y, Takagi N, Harada S and Tanaka Y 2002 Sensors Micromach. Assoc. Soc. 122 404
9. Montelius L, Heidari B, Graczyk M, Ling T, Maximov I and Sarve E-L 2000 Proc. SPIE 3997 442
10. Chen J-K, Ko F-H, Chen H-K and Chou C-T 2004 J. Vac. Sci. Technol. B 22 492
11. Van Oss C J, Chaudhury M K and Good R J 1988 Chem. Rev. 88 927
12. Van Oss C J, Ju L, Chaudhury M K and Good R J 1989 J. Colloid Interface Sci. 128 313
13. Fowkes F M 1962 J. Phys. Chem. 66 382
14. Kaye G W C and Laby T H (ed) 1992 Table of Physical and Chemical Constants 15th edn (Harlow: Longman Scientific and Technical)
15. Lide D R (ed) 1995 Handbook of Chemistry and Physics 76th edn (Boca Raton, FL: CRC Press)
16. Schitz A and Paniez P J 1995 Microelectron. Eng. 27 413
17. van Krevelen D W 1996 Properties of Polymers (Amsterdam: Elsevier)
18. Colburn M, Johnson S, Stewart M, Damle S, Bailey T, Choi B, Wedlake M and Screenivasan V 1999 Proc. SPIE 3676 379
19. Wu S 1974 J. Macromol. Sci. C 10 1
20. Sauer B B and Dee G T 2002 Macromolecules 35 7024
21. Chen J-K, Ko F-H, Chen H-L and Chang F-C 2003 Japan. J. Appl. Phys. 42 3838
22. Xia Y and Whitesides G M 1997 J. Mater. Chem. 7 1069
23. Xia Y and Whitesides G M 1998 Annu. Rev. Mater. Sci. 28 153