Fabrication of curved structures with electron-beam and surface structure characterization

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 22, Issue 2, 2004, Pages 492-500

  Chen, Jem Kun ^a   Ko, Fu Hsiang ^a   Chen, Hsuan Ko ^b   Chou, Cheng Tung ^b   Chen, Hsuen Li ^a   Chang, Feng Chih ^c  

^a NATIONAL NANO DEVICE LABORATORIES   (Taiwan)

^b NATIONAL CENTRAL UNIVERSITY   (Taiwan)

^c NATIONAL CHIAO TUNG UNIVERSITY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

ABERRATIONS; ATOMIC FORCE MICROSCOPY; CHEMICAL BONDS; DEGASSING; ELECTRON BEAMS; ELECTRON SCATTERING; EPOXY RESINS; FOURIER TRANSFORM INFRARED SPECTROSCOPY; INTERFACES (MATERIALS); MICROELECTROMECHANICAL DEVICES; MICROPROCESSOR CHIPS; OPTICAL SYSTEMS; PLASMA THEORY; SCANNING ELECTRON MICROSCOPY; SURFACE ROUGHNESS;

CURVED STRUCTURES; ION OPTICAL SYSTEMS; LIQUID METAL ION SOURCES (LIMS); MICROFLUIDIC STRUCTURES;

POLYMERS;

EID: 2342481798     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1645884     Document Type: Article

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