Unbalanced magnetic field configuration: Plasma and film properties

Journal of Physics Condensed Matter

Volumn 18, Issue 32, 2006, Pages

  Rodil, S E ^a   Olaya, J J ^a  

^a INSTITUTO DE INVESTIGACIONES EN MATERIALES   (Mexico)

Author keywords

[No Author keywords available]

Indexed keywords

COATINGS; CORROSION; ELECTRONS; IONIZATION; MAGNETIC FIELD EFFECTS; MAGNETRON SPUTTERING; MICROSTRUCTURE; PLASMA DENSITY; THERMAL EFFECTS; THIN FILMS; WEAR RESISTANCE;

FILM PROPERTIES; MAGNETIC FIELD CONFIGURATION; PLASMA IONIZATION; PLASMA POTENTIAL;

CHROMIUM COMPOUNDS;

EID: 33746711132     PISSN: 09538984     EISSN: 1361648X     Source Type: Journal    
DOI: 10.1088/0953-8984/18/32/S02     Document Type: Article

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