The influence of the ion bombardment on the optical properties of TiNx and ZrNx coatings

Surface and Coatings Technology

Volumn 108-109, Issue , 1998, Pages 230-235

  Mitterer, C ^a   Mayrhofer, P H ^a   Waldhauser, W ^a   Kelesoglu, E ^a   Losbichler, P ^a  

^a Institut fur Metallkunde und Werkstoffprufung   (Austria)

Author keywords

Decorative coatings; Optical properties; Transition metal nitrides; Unbalanced magnetron sputtering

Indexed keywords

CRYSTAL MICROSTRUCTURE; DECORATION; FILM GROWTH; ION BOMBARDMENT; LATTICE CONSTANTS; MAGNETIC FIELDS; MAGNETRON SPUTTERING; OPTICAL PROPERTIES; STOICHIOMETRY; TITANIUM NITRIDE; X RAY CRYSTALLOGRAPHY; ZIRCONIUM COMPOUNDS;

ELECTRON PROBE MICROANALYSIS (EPMA); HELMHOLTZ COIL SYSTEM; ZIRCONIUM NITRIDE;

CERAMIC COATINGS;

EID: 0040366385     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(98)00651-3     Document Type: Article

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