Stability of sputtered ITO thin films to the damp-heat test

Surface and Coatings Technology

Volumn 201, Issue 1-2, 2006, Pages 309-312

  Guillen C ^a   Herrero, J ^a  

^a CIEMAT   (Spain)

Author keywords

Electrical properties; ITO; Stability; Structure

Indexed keywords

DEGRADATION; ELECTRIC PROPERTIES; GLASS; LIME; OPTICAL PROPERTIES; SPUTTERING; STABILITY; STRUCTURE (COMPOSITION); TEMPERATURE; THIN FILMS;

DAMP-HEAT TEST; INDIUM TIN OXIDE (ITO); SODA LIME GLASS;

INDIUM COMPOUNDS;

DEGRADATION; ELECTRIC PROPERTIES; GLASS; INDIUM COMPOUNDS; LIME; OPTICAL PROPERTIES; SPUTTERING; STABILITY; STRUCTURE (COMPOSITION); TEMPERATURE; THIN FILMS;

EID: 33746108899     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.surfcoat.2005.11.114     Document Type: Article

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