Influence of O2 admixture and sputtering pressure on the properties of ITO thin films deposited on PET substrate using RF reactive magnetron sputtering

Surface and Coatings Technology

Volumn 173, Issue 2-3, 2003, Pages 299-308

  Kim, Young Soon ^a   Park, Young Chul ^a   Ansari, S G ^a   Lee, Jeong Young ^a   Lee, Byung Soo ^a   Shin, Hyung Shik ^a  

^a Chonbuk National University   (South Korea)

Author keywords

Conductivity; Indium; Polymer substrate; Reactive sputtering

Indexed keywords

MAGNETRON SPUTTERING; MIXTURES; POLYETHYLENE TEREPHTHALATES; SUBSTRATES;

SPUTTERING PRESSURE;

THIN FILMS;

SPUTTERING;

EID: 0038608745     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(03)00717-5     Document Type: Article

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