Effect of DC self-bias on the adhesion of diamond-like carbon deposited on metal tracks by RF-PECVD

IEE Proceedings: Science, Measurement and Technology

Volumn 153, Issue 4, 2006, Pages 164-167

  Paul, S ^a  

^a DE MONTFORT UNIVERSITY   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

ADHESION; DEPOSITION; ELECTRONIC EQUIPMENT; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; SURFACE TOPOGRAPHY;

HARD COATING; METAL COVERAGE; METAL TRACKS; SUBSTRATE TOPOGRAPHY;

DIAMOND LIKE CARBON FILMS;

EID: 33746094227     PISSN: 13502344     EISSN: None     Source Type: Journal    
DOI: 10.1049/ip-smt:20060006     Document Type: Article

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