Silicon microelectronics technology

Bell Labs Technical Journal

Volumn 2, Issue 4, 1997, Pages 76-102

  Clemens, James T ^a  

^a NONE

Author keywords

[No Author keywords available]

Indexed keywords

BIPOLAR INTEGRATED CIRCUITS; BIPOLAR TRANSISTORS; DEPOSITION; LITHOGRAPHY; OXIDATION; PASSIVATION; SEMICONDUCTING SILICON; SEMICONDUCTOR DEVICE MANUFACTURE; SEMICONDUCTOR DOPING; VLSI CIRCUITS;

PLANAR PROCESSES; SILICON CRYSTAL TECHNOLOGY; SILICON OXIDATION;

MICROELECTRONIC PROCESSING;

EID: 0031223839     PISSN: 10897089     EISSN: None     Source Type: Journal    
DOI: 10.1002/bltj.2084     Document Type: Article

References (20)

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