Closed form expression for self-sensing microcantilever-based mass sensing

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6173, Issue , 2006, Pages

  Gurjar, Miheer ^a   Jalili, Nader ^a  

^a Smart Structures and Nanoelectromechanical Systems Laboratory   (United States)

Author keywords

Mass detection; MEMS; Microcantilever; Piezoelectric actuation; Self sensing

Indexed keywords

MATHEMATICAL MODELS; MICROACTUATORS; NUMERICAL METHODS; PARAMETER ESTIMATION; PIEZOELECTRIC DEVICES; PROBLEM SOLVING; VIBRATION CONTROL;

MASS DETECTION; MEMS; MICROCANTILEVERS; PIEZOELECTRIC ACTUATION; SELF-SENSING;

CANTILEVER BEAMS;

EID: 33745957049     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.658077     Document Type: Conference Paper

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