Effect of stress-induced phase transformation on nanomechanical properties of sputtered amorphous carbon films

Applied Physics Letters

Volumn 82, Issue 15, 2003, Pages 2437-2439

  Lu, W ^a   Komvopoulos, K ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ARGON; AUGER ELECTRON SPECTROSCOPY; BINDING ENERGY; CARBON; CHEMICAL BONDS; ION BOMBARDMENT; PHASE TRANSITIONS; RESIDUAL STRESSES; SPUTTER DEPOSITION; STRESSES; X RAY PHOTOELECTRON SPECTROSCOPY;

HYBRIDIZATION;

AMORPHOUS FILMS;

EID: 0037651085     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1566800     Document Type: Article

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