Tribological behaviour of thin a-C and a-C:H films with different topographic structure under rotating and oscillating motion for dry lubrication

Surface and Coatings Technology

Volumn 188-189, Issue 1-3 SPEC.ISS., 2004, Pages 530-533

  Bandorf, Ralf ^a   Lüthje, Holger ^a   Henke, Cord ^a   Sick, Jan Hinrich ^a   Küster, Rolf ^a  

^a FRAUNHOFER INSTITUTE FOR SURFACE ENGINEERING AND THIN FILMS IST   (Germany)

Author keywords

a C; a C:H; Amorphous carbon; Diamondlike carbon; Friction coefficient; Microfriction; Microstructure; Pin on disc; W C:H

Indexed keywords

FRICTION; LUBRICATION; MICROELECTROMECHANICAL DEVICES; MICROSTRUCTURE; SILICON; SURFACE ROUGHNESS;

FLUID LUBRICATION; MICORTRIBOLOGICAL BEHAVIOUR; MICROPROBES; NANOFILMS;

TRIBOLOGY;

DIAMOND-LIKE CARBON; FRICTION; LUBRICATION; MICROSTRUCTURE; STRUCTURAL ANALYSIS; TRIBOLOGY;

EID: 14644437133     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.surfcoat.2004.07.010     Document Type: Article

References (11)

1. H. Gatzen H.-D. Stölting S. Büttgenbach H. Dimigen Proc. of Actuator 2000 2000 363
2. B. Bhushan Diamond Relat. Mater. 8 1999 1985
3. A.V. Kulkarni B. Bhushan J. Mater. Res. 10 10 1997 2707
4. A.H. Lettington in: Y. Tzeng M. Yoshikawa M. Murakawa A. Feldmann (Eds.) Applications of Diamond Films and Related Materials 1991 Elsevier New York 703
5. R. Bandorf, thesis, IST Berichte Nr. 15, IRB Verlag Stuttgart, 2002.
6. C.P. Klages K. Bewilogua in: R. Riedel (Ed.) Handbook of Ceramic Hard Materials vol. 2 2000 Wiley-VCH Weinheim 623
7. M. Schmidt A. Wortmann H. Lüthje S. Büttgenbach Proc. SPIE Int. Soc. Opt. Eng. 4407 2001 158
8. H.-H. Gatzen M. Beck Wear 254 2003 907
9. R. Bandorf H. Lüthje K. Schiffmann T. Staedler A. Wortmann Microsyst. Technol. 8 1 2002 51
10. R. Bandorf H. Lüthje A. Wortmann T. Staedler R. Wittorf Surf. Coat. Technol. 174-175 2003 461
11. T. Staedler K. Schiffmann Surf. Sci. 482-485 2 2001 1125