A novel a-Si:H mechanical stress sensor

Thin Solid Films

Volumn 427, Issue 1-2, 2003, Pages 191-195

  De Cesare, G ^a   Gavesi, M ^b   Palma, F ^a   Ricco B ^b  

^a SAPIENZA UNIVERSITY OF ROME   (Italy)

^b UNIVERSITY OF BOLOGNA   (Italy)

Author keywords

A Si:H; Mechanical stress; Sensor

Indexed keywords

AMORPHOUS SILICON; BENDING (DEFORMATION); ELECTRIC PROPERTIES; STRESSES; THIN FILMS;

MECHANICAL STRESS SENSORS;

SILICON SENSORS;

EID: 0037416656     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(02)01223-3     Document Type: Article

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