High voltage thin film transistors integrated with MEMS

Sensors and Actuators, A: Physical

Volumn 130-131, Issue SPEC. ISS., 2006, Pages 297-301

  Chow, Eugene M ^a   Lu, Jeng Ping ^a   Ho, Jackson ^a   Shih, Chinwen ^a   De Bruyker, Dirk ^a   Rosa, Michel ^a   Peeters, Eric ^a  

^a PALO ALTO RESEARCH CENTER   (United States)

Author keywords

Electrostatic actuation; High voltage; Integrated drivers; Thin film transistor (TFT)

Indexed keywords

ELECTRIC POTENTIAL; ELECTROSTATIC ACTUATORS; LOW TEMPERATURE EFFECTS; MICROELECTROMECHANICAL DEVICES;

ELECTROSTATIC ACTUATION; HIGH VOLTAGES; INTEGRATED DRIVERS; MEMS STRUCTURES;

THIN FILM TRANSISTORS;

EID: 33745850748     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2005.10.028     Document Type: Article

References (12)

1. Daniel J.H., Krusor B., Apte R.B., Mulato M., Van Schuylenbergb K., Lau R., Do T., Street R.A., Gore-dema A., Boils-Boissier D.C., and Kazmaier P.M. Micro-electro-mechanical system fabrication technology applied to large area X-ray image sensor arrays. J. Vac. Sci. Technol. A 19 (2001) 1219-1223
2. Biegelsen D.K., Berlin A.A., Cheung P., Fromherz M., Goldberg D., Jackson W.B., Preas B., Reich J., and Swartz L.E. AirJet paper mover: an example of mesoscale MEMS. Proceedings of the SPIE - The International Society for Optical Engineering - Micromachined Devices and Components VI, vol. 4176. September 18-19 (2000) 122-129
3. Brosnihan T.J., Brown S.A., Brogan A., Gormley C.S., Collins D.J., Sherman S.J., Lemkin M., Polce N.A., and Davis M.S. Optical IMEMS-a fabrication process for MEMS optical switches with integrated on-chip electronics. Transducers, 12th International Conference on Solid-State Sensors, Actuators and Microsystems, vol. 2. Boston, MA (2003) 1638-1642
4. Garverick S.L., Nagy M.L., Kane M.J., and Guo J. Bipolar pulse width modulation driver for MEMS electrostatic actuator arrays. CICC Custom Integrated Circuits Conference. San Jose, CA, USA, September 21-24 (2003) 481-484
5. Martin R.A., Da Costa V.M., Hack M., and Shaw J.G. High-voltage amorphous silicon thin-film transistors. IEEE Trans. Electron Devices 40 (1993) 634-644
6. Lu J.P., Mei P., Fulks R.T., Rahn J., Ho J., Wang Y., Boyce J.B., and Street R.A. Excimer laser processing for a-Si and poly-Si thin film transistors for imager applications. J. Vac. Sci. Technol. A 18 (2000) 1823-1829
7. Varadan V.K. Polymer and carbon nanotube-based MEMS accelerometer with modified organic electronics and thin film transistor. Proceedings of the SPIE-The International Society for Optical Engineering: Smart Structures and Materials 2003. Smart Electronics, MEMS, vol. 5055. San Diego, CA, USA, March 3-5 (2003) 87-97
8. Hashiguchi G., Mimura H., and Fujita H. Multi-layered fabrication of microstructures and thin film transistors-application to polycrystalline silicon field emitters controlled by TFTs. Ninth International Workshop on Micro Electromechanical Systems. San Diego, CA (1996) 49-54
9. Bouchinha M., Chu V., and Conde J.P. Application of thin-film micromachining on glass. Amorphous and Microcrystalline Silicon Technology-1998 Symposium. 14-17 April 1998, San Francisco, CA, USA (1999) 85-90
10. Mahfoz-Kotb H., Salaun A.C., Mohammed-Brahim T., and Bonnaud O. Air-gap polycrystalline silicon thin-film transistors for fully integrated sensors. IEEE Electron Device Lett. 24 (2003) 165-167
11. Chua C.L., Fork D.K., and Hantschel T. Densely packed optoelectronic interconnect using micromachined springs. IEEE Photonics Technol. Lett. 14 (2002) 846-848
12. Rosa M.A., De Bruyker D., Volkel A.R., Peeters E., and Dunec J. A novel external electrode configuration for the electrostatic actuation of MEMS based devices. J. Micromech. Microeng. 14 (2004) 446-451