Application of thin-film micromachining on glass

Materials Research Society Symposium - Proceedings

Volumn 507, Issue , 1999, Pages 85-90

  Boucinha, M ^a   Chu, V ^a   Conde, J P ^a  

^a INESC   (Portugal)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS SILICON; CRYSTALLINE MATERIALS; ETCHING; GLASS; HYDROFLUORIC ACID; MICROMACHINING; SILICON NITRIDE; THIN FILM TRANSISTORS;

THIN-FILM MICROMACHINING;

SEMICONDUCTOR DEVICE MANUFACTURE;

EID: 0032655378     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (5)