Polymer and carbon nanotube based MEMS accelerometer with modified organic electronics and thin film transistor

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5055, Issue , 2003, Pages 87-97

  Varadan, Vijay K ^a  

^a PENNSYLVANIA STATE UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACCELEROMETERS; CARBON NANOTUBES; DISPLAY DEVICES; ELECTRIC CURRENTS; GATES (TRANSISTOR); GYROSCOPES; MICROSENSORS; THIN FILM TRANSISTORS;

ORGANIC ELECTRONICS;

MICROELECTROMECHANICAL DEVICES;

EID: 0242467968     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.497439     Document Type: Conference Paper

References (40)

1. V. K. Varadan, and V. V. Varadan, "3D MEMS Structures and their Applications" (Invited Paper presented at the International Symposium on Microsystems, Intelligent Materials and Robots, Tohoku University, Japan, 1995)
2. K. Minami, H. Morishita, M. Esashi, A bellows-shape electrostatic microactuator, Sensors and Actuators 72(1999), pp.269-276.
3. R. Pelrine, R. Kornbluh, J. Joseph, S. Chiba, Electrostriction of polymer films for microactuators, Proc. IEEE MEMS'97, pp. 238-243 1997.
4. K. Lee, N. LaBianca, S. Rishton and S. Zohlgharnain, " Micromachining applications for a high resolution ultra-thick photoresist, " J. Vac. Science. Technol., B13, pp. 3012-3016
5. th Inter. Conf. Micro Electro Mechanical Systems, MEMS 2000., pp. 148-152, 2000
6. L. Ruiz de Angulo, J.S. Abell, I.R. Harris, Magnetostrictive properties of polymer bonded Terfenol-D, Journal of Magnetism and Magnetic Materials 157-158 May 2 1996. p 508-509.
7. L. K. Lagorce and M.G.Allen, Micromachined Polymer Magnets, ISAF'96, pp.85-90.
8. J.-P. Fouassier, Photoinitiation photopolymerization and photocuring: fundamentals and applications, Hanser/Gardener, 1995.
9. V.K. Varadan, X Jiang, and V.V. Varadan, Microstereolithography and other fabrication techniques for 3D MEMS, John Wiley 2001.
10. K. Ikuta and K. Hirowatari, " Real three dimensional microfabrication using stereolithography and metal molding," Proc. IEEE MEMS, pp. 42-47, 1993
11. L. Beluze, A. Bertch and P. Renaud, "Microstereolithography: a new process to build complex three-dimensional objects," Proc. SPIE, 3680, 808-817, 1999.
12. J.M. Shaw and P.F. Seidler, "Organic electronics: Introduction," IBM J. Research and Development, vol. 45, pp. 3-9, 2001.
13. F. Garnier, R. Hajlaoui, A. Yasser, and P. Srivastava, "All Polymer Field-Effect Transistors Realized by Printing Techniques," Science 265, 1684 (1994).
14. J. H. Burroughes, C. A. Jones, and R. H. Friend, "New Semiconductor Device Physics in Polymer Diodes and Transistors," Nature 335, 137 (1988).
15. A. R. Brown, A. Pomp, C. M. Hart, and D. M. de Leeuw, "Logic Gates Made from Polymer Transistors and Their Use in Ring Oscillators," Science 270, 972 (1995).
16. J. H. Schon, S. Berg, C. Kloc, and B. Batlogg, "Ambipolar Pentacene Field-Effect Transistors and Inverters," Science 287, 1022 (2000).
17. J. H. Schon, C. Kloc, and B. Batlogg, "Perylene: A Promising Field-Effect Transistor Material," Appl. Phys. Lett. 77, 3776 (2000).
18. 3," J. Sol. State Chem. 114, 159 (1995).
19. C. D. Dimitrakopoulos, S. Purushothaman, J. Kymissis, A. Callegari, and J. M. Shaw, "Low Voltage Transistors on Plastic Comprising High-Dielectric-Constant Gate Insulators," Science 283, 822 (1999).
20. A Dodabalapur The future of organic semiconductor devices, IEEE
21. J.H, Schon, C. Kloc, A. Dodabalapur, and B. Batlogg, An organic solid-state injection laser, Scince, vol. 289, pp. 589-592, 2000.1
22. H. E. Katz, J. J. Johnson, A. J. Lovinger, and W. Li, J. Amer. Chem. Soc. 122, 7787 (2000).
23. Z. Bao, A. J. Lovinger, and J. Brown, "New Air-Stable n-Channel Organic Thin Film Transistors," J. Amer. Chem. Soc. 120, 207 (1998). 609
24. R. Martel, T. Schmidt, H. R. Shea, T. Hertel, Ph. Avouris, Single- and multi-wall carbon nanotube field-effect transistor, Applied Physics Letters, v73, n17, 2447-2449, 1998
25. S. Iijima, "Helical microtubules of graphitic carbon", Nature 354, 56-58, 1991
26. M. S. Dresselhaus, G. Dresselhaus, R. Saito, "Physics of carbon nanotubes", Carbon v33, 883-891, 1995
27. J.W.G. Wildöer, L.C. Venema, A.G. Rinzler, R.E. Smalley, C. Dekker, "Electronic structure of atomically resoloved carbon nanotubes", Nature, 391, 59-62, 1998
28. T. W. Ebbesen and P. M. Ajayan, Nature, 358, 220-222, 1992.
29. Ivanov V, Nagy J B, Lambin P, Lucas A, Zhang X B, Zhang X F, Bernaerts D, Tendeloo G V, Amelinckx S, Landuyt J V, The study of carbon nanotubes produced by catalytic method, Chem. Phys. Lett., vol 223, 329-335, 1994
30. V.K. Varadan and J. Xie, "Large scale manufacturing of functionalized carbon nanotubes and their applications to EMI shielding, microfuel cell, batteries and structural components. US Patent Pending (2002).
31. J. Xie, N. Zhang, M. Guers and V.K. Varadan, "Ultraviolet-curable polymer composite with chemically bonded carbon nanotubes for microelectromechanical system applications," Smart Mater. Struct. Vol. 11, pp. 575-580, 2002.
32. E.V. Barrera, "Key methods for developing single-wall nanotube composites", JOM, 38-42, 2000
33. M. S. P. Shaffer, X. Fan, A. H. Windle, "Dispersion and packing of carbon nanotubes", Carbon 36, n11, 1603-1612, 1998
34. N. Zhang, J.Xie, M. Guers, and V.K. Varadan, Functionalization of Carbon nanotubes by potassium permanganate with the help of phase transfer catalyst, submitted to Smart Mater. Struct. (2002)
35. P.K. Ajmera and I.-H. Song, "Laterally movable gate FET (LMGFET) for on-chip configuration of MEMS with electronics," In SPIE Proceedings vol. 4334, pp. 30-37, 2001.
36. S.A. Curran, P.M. Ajayan, W.J. Blau, D.L. Carroll, J.N. Coleman, A.B. Dalton, A.P. Davey, A. Drury, B. McCarthy, S. Maier, A. Strevens, "Composite from poly(m-phenylenevinylene-co-2,5-dioctoxy-p-phenylenevinylene) and carbon nanotubes: A novel material for molecular optoelectronics," Adv. Mater., vol. 10, pp. 1091-1093, 1998.
37. A.J. Lovinger and L.J. Rothberg, "Electrically active organic and polymeric materials for thin film transistor technologies," J. Mater. Res., vol. 11, pp. 1581-1592, 1996
38. A. Dodabalapur, H. E. Katz, L. Torsi, and R.C. Haddon, Science 269, 1560 (1995).
39. R. Tamura and M. Tsukada, "Electronic transport in carbon nanotube junctions," Solid State Communications, vol. 101, pp 601-605, 1997.
40. E. Kymakis and G.A.J. Amaratunga, "Single-wall carbon nanotube/conjugated polyer photovoltaic devices," Appl. Phys. Lett., vol. 80, pp. 112-114, 2002.