Micro-electro-mechanical system fabrication technology applied to large area x-ray image sensor arrays

Journal of Vacuum Science and Technology, Part A: Vacuum, Surfaces and Films

Volumn 19, Issue 4, 2001, Pages 1219-1223

  Daniel, J H ^a   Krusor, B ^a   Apte, R B ^a   Mulato, M ^a   Van Schuylenbergh, K ^a   Lau, R ^a   Do, T ^a   Street, R A ^a   Goredema, A ^b   Boils Boissier, D C ^b   Kazmaier, P M ^b  

^a PALO ALTO RESEARCH CENTER   (United States)

^b XEROX RESEARCH CENTRE OF CANADA   (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

DISPLAY DEVICES; METALLIZING; MICROELECTROMECHANICAL DEVICES; PHOTORESISTS; PLATING; SILICON WAFERS; SUBSTRATES; THIN FILMS;

X-RAY IMAGE SENSORS;

IMAGE SENSORS;

EID: 0035392006     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1380226     Document Type: Article

References (13)