AirJet paper mover: An example of meso-scale MEMS

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4176, Issue , 2000, Pages 122-129

  Biegelsen, David ^a   Berlin, Andrew ^a   Cheung, Patrick ^a   Fromherz, Markus ^a   Goldberg, David ^a   Jackson, Warren ^a   Preas, Bryan ^a   Reich, James ^a   Swartz, Lars ^a  

^a PALO ALTO RESEARCH CENTER   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DEGREES OF FREEDOM (MECHANICS); MICROACTUATORS; MICROELECTROMECHANICAL DEVICES; MOTION CONTROL; VALVES (MECHANICAL); VLSI CIRCUITS;

AIR JETS;

JETS;

EID: 0034542527     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.395620     Document Type: Conference Paper

References (9)