Bipolar pulse width modulation driver for MEMS electrostatic actuator arrays

Proceedings of the Custom Integrated Circuits Conference

Volumn , Issue , 2003, Pages 481-484

  Garverick, Steven L ^a   Nagy, Michael L ^a   Kane, Michael J ^a   Guo, Jun ^a  

^a Movaz Networks   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ARRAYS; DENSE WAVELENGTH DIVISION MULTIPLEXING; ELECTRIC POTENTIAL; ELECTRIC POWER SUPPLIES TO APPARATUS; MICROACTUATORS; MICROELECTROMECHANICAL DEVICES; PULSE WIDTH MODULATION; ROM;

ELECTROSTATIC MICROACTUATORS; MICROMIRROR DRIVER ARRAY;

ELECTROSTATIC ACTUATORS;

EID: 0242611924     PISSN: 08865930     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (3)

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2. J. T. Koo, "Integrated Circuit Content-Addressable Memories," IEEE J. Solid-State Circuits, vol. 5, no. 5, pp. 208-215, Oct. 1970.
3. J. Doutreloigne, H. De Smet, A. Van Calster, "A versatile micropower high-voltage flat-panel display driver in a 100-V 0.7-μm CMOS intelligent interface technology," vol. 36, no. 12, pp. 2039-2048, Dec. 2001.