Thickness management in three-dimensional laser manufacturing of suspended structures in a single SU-8 layer

Review of Scientific Instruments

Volumn 77, Issue 6, 2006, Pages

  Li, Biao ^a   Gueit, Aurelien ^a   Sharon, Andre ^a  

^a Fraunhofer USA Center for Manufacturing Innovation   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

LASER MANUFACTURING TECHNIQUES; MICROFLUIDIC STRUCTURES; SCANNING LASER SYSTEMS; SPOT-BY-SPOT LASER PULSING;

ASPECT RATIO; BIOTECHNOLOGY; CANTILEVER BEAMS; LASER APPLICATIONS; MEDICAL APPLICATIONS;

FLUIDICS;

EID: 33745714226     PISSN: 00346748     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2204583     Document Type: Article

References (23)

1. D. Walt, Science 308, 217 (2005).
2. K. Wise and K. Najafi, Science 254, 1335 (1991).
3. B. Li, H. Yu, A. Sharon, and X. Zhang, Appl. Phys. Lett. 85, 2426 (2004).
4. D. Burgess, Photonics Spectra 38(11), 34 (2004).
5. C. Lin, G. Lee, B. Chang, and G. Chang, J. Micromech. Microeng. 12, 590 (2002).
6. Y. Chung, F. Tseng, J. Cheng, and W. Lin, Sens. Actuators, A 103, 64 (2003).
7. P. Yao, G. Schneider, and W. Prather, J. Microelectromech. Syst. 14, 799 (2005).
8. G. Witzgall, R. Vrijen, and E. Yablonovitch, Opt. Lett. 23, 1745 (1998).
9. R. Yang, W. Wang, and S. Soper, Appl. Phys. Lett. 86, 161110 (2005).
10. M. Gaudet, S. Arscott, J. Camart, and L. Buchaillot, Proc. MicroTAS 2005, Boston, MA, p. 1189 (2005).
11. H. Sato, T. Kakinuma, J. Go, and S. Shoji, Sens. Actuators, A 111, 87 (2004).
12. M. Man, W. Lee, S. Lee, and S. Lee, Sens. Actuators, A 111, 14 (2004).
13. F. Tay, J. Kan, F. Watt, and W. Choong, J. Micromech. Microeng. 11, 27 (2001).
14. W. Teh, U. Durig, U. Drechsler, C. Smith, and H. Guntherodt, J. Appl. Phys. 97, 054907 (2005).
15. G. Genolet, Ph.D. Thesis, EPFL, 2001.
16. http://www.microchem.com/
17. C. Chung and M. Alien, J. Micromech. Microeng. 15, N1 (2005).
18. R. Lawes, J. Micromech. Microeng. 15, 2198 (2005).
19. http://www.spectraphysics.com/
20. E. Conradie and D. Moore, J. Micromech. Microeng. 12, 368 (2002).
21. K. Jiang, M. Lancaster, I. Llamas-Garro, and P. Lin, J. Micromech. Microeng. 15, 1522 (2005).
22. M. Gaudet, J. Camart, L. Buchaillot, and S. Arscott, Appl. Phys. Lett. 88, 024107 (2006).
23. R. Feng and R. Farris, J. Micromech. Microeng. 13, 80 (2003).