Three-dimensional lithographical fabrication of microchannels

Journal of Microelectromechanical Systems

Volumn 14, Issue 4, 2005, Pages 799-805

  Yao, Peng ^a   Schneider, Garrett J ^a   Prather, Dennis W ^a  

^a UNIVERSITY OF DELAWARE   (United States)

Author keywords

Microchannel; Microfluidics; Three dimensional (3 D) lithography

Indexed keywords

FLUIDICS; INTEGRATED CIRCUITS; PHOTOLITHOGRAPHY; PHOTORESISTS;

MICROCHANNEL; MICROFLUIDICS; THREE DIMENSIONAL LITHOGRAPHY;

MICROELECTROMECHANICAL DEVICES;

EID: 27144436487     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2005.845403     Document Type: Article

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