Micro object handling under SEM by vision-based automatic control

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3519, Issue , 1998, Pages 181-192

  Kasaya, Takeshi ^a   Miyazaki, Hideki ^b   Saito, Shigeki ^b   Sato, Tomomasa ^b  

^a Tokyo Engineering Univ   (Japan)

^b UNIVERSITY OF TOKYO   (Japan)

Author keywords

Automatic control; Generalized Hough transform; Micro manipulation; Microrobotics; Scanning electron microscopy; Visual control

Indexed keywords

ELECTRON BEAMS; HOUGH TRANSFORMS; MANIPULATORS; ROBOTICS; SCANNING ELECTRON MICROSCOPY; SENSORS;

MICRO OBJECT HANDLING; VISION-BASED AUTOMATIC CONTROL;

INTELLIGENT CONTROL;

EID: 0037959954     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.325738     Document Type: Conference Paper

References (9)

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