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Volumn 55, Issue 3, 2001, Pages 292-297
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Effect of optical interference on borophosphosilicate glass profiles obtained with a glow discharge optical emission spectrometer
a
a
HITACHI LTD
(Japan)
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Author keywords
Depth profile; Emission spectroscopy; Glow discharges
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Indexed keywords
BOROPHOSPHATE GLASS;
BOROSILICATE GLASS;
COMPUTER SIMULATION;
EMISSION SPECTROSCOPY;
GLOW DISCHARGES;
LIGHT INTERFERENCE;
PROFILOMETRY;
SILICON WAFERS;
BOROPHOSPHOSILICATE GLASS;
GLOW DISCHARGE OPTICAL EMISSION SPECTROMETERS (GDS);
SPECTROMETERS;
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EID: 0035271491
PISSN: 00037028
EISSN: None
Source Type: Journal
DOI: 10.1366/0003702011951911 Document Type: Article |
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Times cited : (10)
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References (8)
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