Monte carlo model for the argon ions and fast argon atoms in a radio-frequency discharge

IEEE Transactions on Plasma Science

Volumn 27, Issue 5, 1999, Pages 1406-1415

  Bogaerts, Annemie ^a   Gijbels, Renaat ^a  

^a UNIVERSITY OF ANTWERP   (Belgium)

Author keywords

Argon; Argon ions; Fast argon atoms; Glow discharge; Hybrid model; Modeling; Monte carlo; Plasma; Radio frequency

Indexed keywords

ARGON; ATOMS; COMPUTER SIMULATION; ELECTRONS; GLOW DISCHARGES; IONS; MATHEMATICAL MODELS; MONTE CARLO METHODS; PLASMA COLLISION PROCESSES; PLASMA SHEATHS;

CAPACITIVELY COUPLED PLASMAS; RADIO FREQUENCY DISCHARGES;

PLASMA SIMULATION;

EID: 0033204281     PISSN: 00933813     EISSN: None     Source Type: Journal    
DOI: 10.1109/27.799819     Document Type: Article

References (29)

1. R. K. Marcus, Glow Discharge Spectroscopies. New York: Plenum, 1993.
2. R. Payling, D. Jones, and A. Bengtson, Glow Discharge Optical Emission Spectrometry. New York: Wiley/Chichester, 1997.
3. A. Bogaerts, M. van Straaten, and R. Gijbels, "Monte Carlo simulation of an analytical glow discharge: Motion of electrons, ions and fast neutrals in the cathode dark space," Spectrochim. Acta Part B, vol. 50B, no. 2, pp. 179-196, 1995.
4. A. Bogaerts, R. Gijbels, and W. J. Goedheer, "Hybrid Monte Carlo-fluid model of a direct current glow discharge," J. Appl. Phys., vol. 78, no. 4, pp. 2233-2241, 1995.
5. A. Bogaerts and R. Gijbels, "Modeling of metastable argon atoms in a direct current glow discharge," Phys. Rev. A, vol. 52, no. 5, pp. 3743-3751, 1995.
6. "The role of fast argon ions and atoms in the ionization of argon in a direct current glow discharge: A mathematical simulation," J. Appl. Phys., vol. 78, no. 11, pp. 6427-6431, 1995.
7. "Role of sputtered Cu atoms and ions in a direct current glow discharge: Combined fluid and Monte Carlo model," J. Appl. Phys., vol. 79, no. 3, pp. 1279-1286, 1996.
8. A. Bogaerts, R. Gijbels, and J. Vlcek, "Collisional-radiative model for an argon glow discharge," J. Appl. Phys., vol. 84, no. 1, pp. 121-136, 1998.
9. A. Bogaerts, R. Gijbels, and R. J. Carman, "Collisional-radiative model for the sputtered copper atoms and ions in a direct current argon glow discharge," Spectrochim. Acta Part B, in press.
10. A. Bogaerts, R. Gijbels, and W. J. Goedheer, "Hybrid modeling of a capacitively coupled radio-frequency glow discharge in argon: Combined Monte Carlo and fluid model," Jpn. J. Appl. Phys., vol. 38, no. 7B, pp. 4404-4415, 1999.
11. M. J. Kushner, "Distribution of ion energies incident on electrodes in capacitively coupled RF discharges," J. Appl. Phys., vol. 58, no. 11, pp. 4024-4031, 1985.
12. B. E. Thompson, H. H. Sawin, and D. A. Fisher, "Monte Carlo simulation of ion transport through RF glow discharge sheaths," J. Appl. Phys., vol. 63, no. 7, pp. 2241-2251, 1988.
13. M. S. Barnes, J. C. Forster, and J. H. Keller, "Ion kinetics in low-pressure, electropositive, RF glow discharge sheaths," IEEE Trans. Plasma Sci., vol. 19, pp. 240-244, Apr. 1991.
14. P. W. May, D. Field, and D. F. Klemperer, "Modeling radio-frequency discharges: Effects of collisions upon ion and neutral particle energy distributions," J. Appl. Phys., vol. 71, no. 8, pp. 3721-3730, 1992.
15. D. Wang, T. Ma, and Y. Gong, "A Monte Carlo simulation model for plasma source ion implantation," J. Appl. Phys., vol. 73, no. 9, pp. 4171-1175, 1993.
16. V. A. Feoktistov, A. V. Mukhovatova, A. M. Popov, and T. V. Rakhimova, "Self-consistent modeling of low-pressure RF discharges in oxygen plasma," J. Phys. D: Appl. Phys., vol. 28, pp. 1346-1353, 1995.
17. R. W. Boswell and I. J. Morey, "Self-consistent simulation of a parallel-plate RF discharge," Appl. Phys. Lett., vol. 52, no. 1, pp. 21-23, 1987.
18. D. Vender and R. W. Boswell, "Numerical modeling of low-pressure RF plasmas," IEEE Trans. Plasma Sci., vol. 18, pp. 725-732, Aug. 1990.
19. M. Surendra and D. B. Graves, "Particle simulations of radio-frequency glow discharges," IEEE Trans. Plasma Sci., vol. 19, pp. 144-157, Apr. 1991.
20. H. W. Trombley, F. L. Terry, and M. E. Elta, "A self-consistent particle model for the simulation of RF glow discharges," IEEE Trans. Plasma Sci., vol. 19, pp. 158-162, Apr. 1991.
21. V. Vahedi and M. Surendra, "A Monte Carlo collision model for the particle-in-cell method: Applications to argon and oxygen discharges," Comput. Phys. Commun., vol. 87, pp. 179-198, 1995.
22. D. Passchier, "Numerical fluid models for RF discharges," Ph.D. dissertation, University of Utrecht, The Netherlands, 1994.
23. A. V. Phelps, "Cross sections and swarm coefficients for nitrogen ions and neutrals in N? and argon ions and neutrals in Ar for energies from 0.1 eV to 10 keV," J. Phys. Chem. Réf. Data, vol. 20, no. 3, pp. 557-573, 1991.
24. "The application of scattering cross sections to ion flux models in discharge sheaths," J. Appl. Phys., vol. 76, no. 2, pp. 747-753, 1994.
25. A. Bogaerts, "Mathematical modeling of a dc glow discharge in argon," Ph.D. dissertation, University of Antwerp, 1996.
26. C. Wild and P. Koidl, "Ion and electron dynamics in the sheath of radio-frequency glow discharges," J. Appl. Phys., vol. 69, no. 5, pp. 2909-2922, 1991.
27. W. M. Greene, M. A. Hartney, W. G. Oldham, and D. W. Hess, "Ion transit through capacitively coupled Ar sheaths: Ion current and energy distribution," J. Appl. Phys., vol. 63, no. 5, pp. 1367-1371, 1988.
28. J. K. Olthoff, R. J. Van Brunt, and S. B. Radovanov, "Ion kinetic energy distributions in argon RF glow discharges," J. Appl. Phys., vol. 72, no. 10, pp. 4566-4574, 1992.
29. J. K. Olthoff, R. J. Van Brunt, S. B. Radovanov, J. A. Rees, and R. Surowiec, "Kinetic energy distributions of ions sampled from argon plasmas in a parallel-plate, radio-frequency reference cell," J. Appl. Phys., vol. 75, no. 1, pp. 115-125, 1994.