Erosion rate measurements for GD-OES

Journal of Analytical Atomic Spectrometry

Volumn 18, Issue 9, 2003, Pages 1141-1145

  Wilken, L ^a   Hoffmann, V ^a   Wetzig, K ^a  

^a IFW DRESDEN   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

CALIBRATION; EROSION; PLASMAS; PROFILOMETRY; SPECTROMETRY; SPUTTERING;

BOUMANS FORMULA;

GLOW DISCHARGES;

EID: 0141956337     PISSN: 02679477     EISSN: None     Source Type: Journal    
DOI: 10.1039/b306768h     Document Type: Conference Paper

References (20)

1. A. Bengtson, Spectrochim. Acta, 1994, 49B, 411.
2. A. Quentmeier, in Glow Discharge Optical Emission Spectrometry, ed. R. Payling, D. G. Jones and A. Bengtson, John Willey & Sons, Chichester, 1997, ch. 7, pp. 295-317.
3. Surface Chemical Analysis-Determination of Thickness and Chemical Composition of Zinc-Based Metallic Coatings by Glow Discharge Optical Emission Spectrometry (ISO/TC 201/SC 8 N, ISO/WD 16962, 1999).
4. K. A. Marshall, T. J. Casper, K. R. Brushwyler and J. C. Mitchell, J. Anal. At. Spectrom., 2003, 18, 637.
5. P. W. J. M. Boumans, Anal. Chem., 1972, 44, 1219.
6. Z. Weiss, Spectrochim. Acta., 1993, 48B, 1247.
7. R. Payling, Surf. Interface Anal., 1994, 21.
8. R. Payling and D. Jones, in Glow Discharge Optical Emission Spectrometry, ed. R. Payling, D. Jones and A. Bengtson, John Wiley & Sons, Chichester, 1997, ch. 10.2, pp. 460-471.
9. Z. Weiss and P. Smid, J. Anal. At. Spectrom., 2000, 15, 1485.
10. J. Takadoum, J. C. Pivin, J. Pons-Corbeau, R. Berneron and J. C. Charbonnier, Surf. Interface Anal., 1984, 6(4), 174.
11. J. Pons-Corbeau, Surf. Interface Anal., 1985, 7, 169.
12. R. Payling, in Glow Discharge Optical Emission Spectrometry, ed. R. Payling, D. G. Jones and A. Bengtson, John Wiley & Sons, Chichester, 1997, ch. 6.4, pp. 287-291.
13. Z. Weiss, in Glow Discharge Optical Emission Spectrometry, ed. R. Payling, D. Jones and A. Bengtson, John Wiley & Sons, Chichester, 1997, ch. 9.2, 11.3, 11.5, 13.6.
14. T. Asam, Sputtering Rates, http://www.tazgmbh.de.
15. M. Bouchacourt and F. Schwoehrer, in Glow Discharge Optical Emission Spectrometry, ed. R. Payling, D. G. Jones and A. Bengtson, John Wiley & Sons, Chichester, 1997, ch. 2.2, pp. 54-61.
16. L. Wilken, V. Hoffmann, H.-J. Uhlemann, H. Siegel and K. Wetzig, J. Anal. At. Spectrom., 2003, 18, 646.
17. L. Wilken, V. Hoffmann, P. Geisler and K. Wetzig, Patent DE 100 19 257 A1 (2000).
18. J. Angeli, in Glow Discharge Optical Emission Spectrometry, ed. R. Payling, D. G. Jones and A. Bengtson, John Wiley & Sons, Chichester, 1997, ch. 7.4, pp. 319-328.
19. Z. Weiss, in Glow Discharge Optical Emission Spectrometry, ed. R. Payling, D. G. Jones and A. Bengtson, John Wiley & Sons, Chichester, 1997, ch. 7.5, pp. 329-337.
20. R. Payling, M. Aeberhard, J. Michler, C. Authier, P. Chapon, T. Nelis and L. Pitchford, Surf. Interface Anal., 2003, 35, 334.