Residual stress and Curie temperature of Fe-N thin films prepared by dc magnetron sputtering at elevated temperature

Applied Surface Science

Volumn 252, Issue 14, 2006, Pages 4995-5001

  Li, W L ^a   Sun, Y ^a   Fei, W D ^a  

^a HARBIN INSTITUTE OF TECHNOLOGY   (China)

Author keywords

Curie temperature; Fe N thin films; Residual stress

Indexed keywords

IRON; MAGNETRON SPUTTERING; PHASE COMPOSITION; RESIDUAL STRESSES; SUPERCONDUCTING TRANSITION TEMPERATURE; TEMPERATURE MEASUREMENT;

CURIE TEMPERATURE; FE-N THIN FILMS; NITROGEN CONTENT;

THIN FILMS;

EID: 33646563458     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2005.07.012     Document Type: Article

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